Sequence Recipe and Data - Saving the Sequence Data KLA-Tencor P-16+ / P-6 User’s Guide
6-50 KLA-Tencor Confidential 0142530-000 AB
3/13/09
4. Choose either Statistics or Trace. If both require saving, perform the save
function two times, one for each option, giving names to each different data set.
Trace creates a scan data set containing the actual trace data. This can then be
used to display the trace in the Analysis screen for further analysis or
recalculation with new parameters. The system also uses this data to create the
Thumbnail trace for comparison.
Statistics creates a file of the scan data parameters that were set in the scan
recipe used to create the different scans. This data can also be displayed in the
Sequence summary screen and analyzed or recalculated with different scan
parameters.
5. Click
Save. Once a data set has been saved, it is added to the Sequence Data
catalog. The Sequence Data catalog window allows for the selection of
individual data sets for reviewing. Unwanted data sets can also be deleted.
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