0142530-000 AB KLA-Tencor Confidential 1-5
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Introduction & Safety - Safety
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If none of the components are in motion when the door is opened, or when the
interlock is tripped, the system can be activated again by closing the door or
by returning the interlock to its normal operating position. If a scan is taking
place, if one of the components is in motion, or if an attempt is made to
activate the motion system with the interlock tripped, the entire system must
be rebooted.
CAUTION: Under no circumstances should the operator defeat any of
the safety interlocks. There are no operator procedures that require
the door to be open during normal operation. Operation of the system
in service mode with interlocks defeated should only be performed by
trained and qualified KLA -Tencor service Personnel.
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