0142530-000 AB KLA-Tencor Confidential 7-45
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Analyzing 3D Scan Data - Saving Scan Data
10. To save the 2D slice data click File to display is menu. (See Figure 7.33.)
11. Choose
Save Data… to display is dialog box. (See Figure 7.33.) This displays the
Save Scan Data dialog box. It should be set up to save 2D data as shown by the
data type “Scan Data Files (*.dat)” in the
Save as type: field.
12. Click the down-arrow next to
Save In to reveal the available drives and
directories.
13. Select the drive and directory from the drop-down menu.
14. Double-click the folder that the data is to be stored in. A list of all current data
files appear.
15. Enter a name for the data set in the File name variable box.
16. Click
Save to save the data in the new file.
Once a data set has been saved, it is added to the Scan Data catalog. The Scan
Data catalog window allows selection of individual data sets for reviewing. 2D
slice data saved from a 3D scan can be reevaluated in the Analysis screen by
changing the recipe parameters and performing a recalculation of the
information. Unwanted data sets can be deleted.
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