KLA Tencor P-16+ - Page 3

0142530-000 AB KLA-Tencor Confidential
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide
EC COMPLIANCE
At the time of printing, the P-16+ / P-6 Profiler complies with the
essential requirements of the EC (Electromagnetic Compatibility)
Directives listed below:
EC Directives EC 89/392/EEC
EC 89/336/EEC
EC 93/68/EEC
Machinery, Annex 1 EC 98/37/EEC
Low Voltage, Annex 1 EC 73/23/EEC
Harmonized Electromagnetic Standards EN 50082-2:1995
EN 50081-2:1993
EN 55011:2000
Harmonized Safety Standards EN 60204-1:1992
IEC 61010-1, 2001
EN 61010-1:2001 (2nd Edition)
EN 61000-6-2:2005
EN 61000-6-4:2007
IEC 61010-1
Product Safety Assessment SEMI S2-0703
Ergonomic Assessment SEMI S8-0705
Fire Risk Assessment SEMI S14-0704
RoHS Compliance: All P-16+ and P-6 external
peripherals and computer
components used (main
scanner exempt) comply
with the European Union's
Directive 2002/95/EC,
Restrictions of Hazardous
Substances ("RoHS"
Directive).
COPYRIGHT
This document is a copyrighted work of KLA-Tencor Corporation.
Unauthorized copying of its content is strictly prohibited. KLA-Tencor
provides this document without warranty in any form, either expressed
or implied.