Stress (Optional feature) - Creating Stress Data KLA-Tencor P-16+ / P-6 User’s Guide
9-12 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Method Polynomial Fit or 13 Point Least Square Fit
Polynomial Order Chosen as part of the Recipe.
Max. Dev. Maximum Deviation of the fit polynomial from the original
profile
Variance
Variance = (Standard Deviation)
2
Std. Dev. Standard Deviation from the Mean
Table 9.3 Stress Calculation Results Box Contents (Continued)
Result Explanation
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