3D Stress (optional Feature, P-16+ only) - KLA-Tencor P-16+ / P-6 User’s Guide
10-2 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Maximum Deflection The maximum vertical displacement of a data point from a predefined
reference. This reference shall be a flat line between the leveling
cursor areas.
Deflection This is the TIR value between measurement cursors for any stress
related scans.
Center, Maximum, and Average
Stress
The center, maximum, and average stresses where stress is defined
per Stoney’s equation of Film Stress based on an algorithm fit through
the entire data set.
- Center stress: the middle 1/3 of the resulting stress trace
- Maximum Stress: the maximum stress measured over the entire
resulting stress trace
- Average Stress: the average stress measured over the entire
resulting stress scan
Local Stress The average of the stresses measured in between the measurement
cursors or the stress value at a given data point based on Stoney’s
equation by finding the difference in radius between the Post
Measurement and the Pre-Measurement.
Radial Scans Refers to a series of consecutive 2D scans taken automatically by
rotating the substrate about its center at user specified theta intervals.
The radial scans are then used to create a 3D map of stress,
deflection, or radius of curvature.
3D Mesh The creation of a three-dimensional surface by use of algorithms
based on a few Radial Scans taken across user specified intervals on
the substrate.
3D-Deflection Name given to the parameter that identifies the average deflection
value determined by a square, circular, or zigzag measurement tool
used on a 3D Stress Map.
3D-Radius of Curvature Name given to the parameter that identifies the average radius of
curvature determined by a square, circular, or zigzag measurement
tool used on a 3D Stress Map.
3D-Stress Name given to the parameter that identifies the average stress value
within a user specified square, circular, or zigzag measurement tool
used on a 3D stress results map.
3D-Stress Delta Name given to the parameter that identifies the difference in averages
of stress, deflection, or radius of curvature values within two user
specified square measurement tools used on a 3D stress results map.
Profile Extraction Refers to 2D cross-section taken from a 3D image.
Zigzag Measurement Tool Refers to a cursor, whose shape is determined by the user.
Table 10.1 Common Terms Defined
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