KLA Tencor P-16+ - Page 443

0142530-000 / AB KLA-TENCOR CONFIDENTIAL REVISION HISTORY-1
3/13/09
Revision History
Rev.
Rev.
Date Changes Made Author Owner
AA 08/2007 Draft 1 to include updates for P6 model John Warren Norman
Manoukian
AB 1/2009 Updates for P^ Model John Warren Mohamd Najm