KLA Tencor P-16+ - Page 296

APEX 2D/3D - Getting Started - Overview of Apex 2D/3D KLA-Tencor P-16+ / P-6 User’s Guide
8-4 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Building an Analysis Document
Apex contains all the tools needed to build and lay out a complete Analysis
Document in a straightforward way.