2-181-019 S. Cor.: 1200 Line: Low: M *ENG [-16384 to 16383 / 0 / 1line/step]
2-181-020 S. Cor.: 1200 Sub: Low: M *ENG [-2 to 2 / 0 / 0.001line/step]
2-181-021 Skew: C *ENG [-5000 to 5000 / 0 / 0.001 / um]
2-181-029 M. Cor.: Dot: C *ENG [-512 to 511 / 0 / 1dot/step]
2-181-030 M. Cor.: Subdot: C *ENG [-1 to 1 / 0 / 0.01dot/step]
2-181-031 S. Cor.: 1200 Line: Middle: C *ENG [-16384 to 16383 / 0 / 1line/step]
2-181-032 S. Cor.: 1200 Sub: Middle: C *ENG [-2 to 2 / 0 / 0.001line/step]
2-181-033 C. Left Mag.: Subdot: M *ENG [-32 to 32 / 0 / 0.01dot/step]
2-181-034 C. Right Mag.: Subdot: M *ENG [-32 to 32 / 0 / 0.01dot/step]
2-181-035 S. Cor.: 1200 Line: Standard: C *ENG [-16384 to 16383 / 0 / 1line/step]
2-181-036 S. Cor.: 1200 Sub: Standard: C *ENG [-2 to 2 / 0 / 0.001line/step]
2-181-037 S. Cor.: 1200 Line: Low: C *ENG [-16384 to 16383 / 0 / 1line/step]
2-181-038 S. Cor.: 1200 Sub: Low: C *ENG [-2 to 2 / 0 / 0.001line/step]
2-181-039 Skew: Y *ENG [-5000 to 5000 / 0 / 0.001um/
step]
2-181-047 M. Cor.: Dot: Y *ENG [-512 to 511 / 0 / 1dot/step]
2-181-048 M. Cor.: Subdot: Y *ENG [-1 to 1 / 0 / 0.01dot/step]
2-181-049 S. Cor.: 1200 Line: Middle: Y *ENG [-16384 to 16383 / 0 / 1line/step]
2-181-050 S. Cor.: 1200 Sub: Middle: Y *ENG [-2 to 2 / 0 / 0.001line/step]
2-181-051 Y. Left Mag.: Subdot: M *ENG [-32 to 32 / 0 / 0.01dot/step]
2-181-052 Y. Right Mag.: Subdot: M *ENG [-32 to 32 / 0 / 0.01dot/step]
2-181-053 S. Cor.: 1200 Line: Standard: Y *ENG [-16384 to 16383 / 0 / 1line/step]
2-181-054 S. Cor.: 1200 Sub: Standard: Y *ENG [-2 to 2 / 0 / 0.001line/step]
2-181-055 S. Cor.: 1200 Line: Low: Y *ENG [-16384 to 16383 / 0 / 1line/step]
2-181-056 S. Cor.: 1200 Sub: Low: Y *ENG [-2 to 2 / 0 / 0.001line/step]
2-181-057 S. Cor.: 600 Sub *ENG [-1 to 1 / 0 / 0.001line/step]
Engine SP Tables - SP2000-1
185