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Peak average of primary Va
Peak average of primary Vb
Peak average of primary Vc
Peak maximum of primary Vc
Peak minimum of primary Vc
Peak maximum of primary Vab
Peak minimum of primary Vab
Peak average of primary Vab
Peak average of primary Vbc
Peak maximum of primary Vbc
Peak minimum of primary Vbc
Peak maximum of primary Vca
Peak minimum of primary Vca
Peak average of primary Vca
Peak average of primary V0
Peak maximum of primary V0
Peak minimum of primary V0
Peak maximum of primary Vs
Peak minimum of primary Vs
Peak average of primary Vs
Peak maximum of primary Vs2
Peak minimum of primary Vs2
Peak average of primary Vs2
Peak average of primary Iem
Peak maximum of primary Iem
Peak minimum of primary Iem
IaB Max maximum of primary
IaB Min minimum of primary
IaB Ave average of primary
IbB Max maximum of primary
IbB Min minimum of primary
IbB Ave average of primary
IcB Max maximum of primary
IcB Min minimum of primary
IcB Ave average of primary
IeB Max maximum of primary
IeB Min minimum of primary
IeB Ave average of primary
Peak maximum of secondary Va
Peak minimum of secondary Va
Peak average of secondary Va
Peak maximum of secondary Vb
Peak minimum of secondary Vb
Peak average of secondary Vb
Peak maximum of secondary Vc
Peak minimum of secondary Vc
Peak average of secondary Vc
Peak maximum of secondary Vab
Peak minimum of secondary Vab
Peak average of secondary Vab
Peak maximum of secondary Vbc
Peak minimum of secondary Vbc
Peak average of secondary Vbc
Peak maximum of secondary Vca
Peak minimum of secondary Vca
Peak average of secondary Vca
Peak maximum of secondary V0
Peak minimum of secondary V0
Peak average of secondary V0
Peak maximum of secondary Vs
Peak minimum of secondary Vs
Peak average of secondary Vs
Peak maximum of secondary Vs2
Peak minimum of secondary Vs2
Peak average of secondary Vs2
Peak minimum of secondary Iem
Peak maximum of secondary Iem
Peak average of secondary Iem
SIGMA_IY value(phase-A) tool monitoring
SIGMA_IY value(phase-B) tool monitoring
SIGMA_IY value(phase-C) tool monitoring
Ia local measurement secondary
Ib local measurement secondary
Ic local measurement secondary
Ie local measurement secondary
Ie remote CH1 measurement secondary
Ie remote CH2 measurement secondary
Ia remote CH2 measurement secondary
Ia remote CH1 measurement secondary
Ib remote CH1 measurement secondary
Ib remote CH2 measurement secondary
Ic remote CH2 measurement secondary
Ic remote CH1 measurement secondary
V1 local measurement secondary
V1 remote CH1 measurement secondary
V1 remote CH2 measurement secondary