ECM SearchFH/FZ5 Processing Item Function Reference Manual
133
2
Inspecting and Measuring
Settings Flow (ECM Search)
Set up ECM search according to the following steps.
List of ECM Search Items
Item name Description
Model register
This item registers the pattern characteristic of the measur
ement image as a model.
Model parameter values can be changed as needed to
address unstable measurement results or to
increase the processing speed. Normally, the factory default value will be used.
Reference: Model Registration (ECM Search) (p.134)
Error model
This item can be changed if necessary. As an error mode
l, register a model with similar characteristics
to the registered one, but with its correlation value lowered when measured.
Reference: Error Model Registration (ECM Search) (p.137)
Region setting
This item is used to set up the measurement area.
Instead of measuring the entire input image, narrowing the
measurement area shortens the processing
time.
Reference: Region Setting (ECM Search) (p.137)
Detection point
This item can be changed if necessary. Usually, the central position of the
registered model is
registered as the search detection point.
Reference: Detection Point (ECM Search) (p.138)
Ref. setting
This item can be changed if necessary. Usually, the central position of the
registered region is
registered as the reference position.
Reference: Reference Setting (ECM Search) (p.139)
Measurement
This item specifies the judgement condition for measuremen
t results. Specify the criteria to judge the
measurement result if the X and Y coordinates and the correlation values with the model are OK.
Reference: Measurement Parameters (ECM Search) (p.140)
Output parameter
This item can be changed if necessary. Normally, the factory default value will be used.
Use the output parameter to specify how to handle the coordinates.
Reference: Output Parameters (ECM searc
h
) (p.141)
Necessary Steps Optional Steps
Result verification/adjustment
▲
Model Registration (ECM Search)
▲
Region Setting (ECM Search)
▲
Measurement Parameters (ECM Search)
▲
Error Model Registration (ECM Search)
▲
Reference Setting (ECM Search)
▲
Output Parameters (ECM Search)
Start
Settings completed
Test measurement
▲
Detection Point (ECM Search)