Machine Simulator
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FH/FZ5 Processing Item Function Reference Manual
Machine Simulator
You can simulate the movement of an alignment mark and verify the operation of alignment-related processing
items without an actual stage or robot. Actual coordinate system conditions (origin position, magnification, axis
angle) can be set as desired in this processing item group. For the origin position, set the rotating center of the
stage.
Used in the Following Case
• Check alignment operations before connecting the stage
• Create scene data before connecting the stage
Settings Flow (Machine Simulator)
Set up the machine simulator with the following steps.
Make sure to set Set as necessary.
Check results/make adjustments
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Machine Settings (Machine Simulator)
Start
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Actual Settings (Machine Simulator)
â–²
Movement Settings (Machine Simulator)
Settings complete
Test measurement
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