Calc Axis Move by Multipoint
804
FH/FZ5 Processing Item Function Reference Manual
Judgement Condition (Calc Axis Move by Multipoint)
This item specifies the condition for measurement results.
1 In the Item Tab area, click [Judgement condition].
2 In the "Judgement condition" area, set
each item.
The following parameters are displayed in this menu based on the stage type.
Setting item
Setting value
[Factory default]
Description
X/Y-axis movement
[-99999.9999] to
[99999.9999]
Used to set upper and lower limit values for the movement
amount in the axis direction.
The axes that can be set will vary according to the
processin
g
item containing the external device information
specified by [Machine setting].
Error max.
0 to 99999.9999
[9
9999.9999]
This setting is enabled when [Measure type] in the [Calc.
pa
rameter] tab is set to [Points alignment].
It is used to set the upper and lower limit values for the
dif
f
erence between the points at which the difference
between the reference position and measurement position
is a maximum.
Displayed content
Not
selected
XY XYθ θXY UVW UVWR X(Y) Xθ(Yθ) θX(θY) 3 axes 4 axes
X axis movement
amount
Judg
ement upper/lower
li
mi
t values
Y axis movement
amoun
t
Judg
ement upper/lower
li
mi
t values
θ axis angle movement
amoun
t
Judgement upper/lower
li
mi
t values
*1
*1
*1
*1
θ axis linear movement
amoun
t
Judgement upper/lower
li
mi
t values
*2
*2
*2
*2
U axis movement
amount
Judg
ement upper/lower
li
mi
t values
If the reference data is the UVWR stage
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