Fine Matching
380
FH/FZ5 Processing Item Function Reference Manual
Settings Flow (Fine Matching)
Set up fine matching in the follow steps.
List of Fine Matching Items
Item name Description
Model register
This item registers the pattern characteristic of the measurement image as a model.
Model parameter values can be changed as needed to address unstable measurement results or to
increase the processing speed. Normally, the factory default value will be used.
Reference: XModel Registration (Fine Matching) (p.381)
Diff. image disp.
Modify this setting as necessary when defects cannot be detected successfully. This sets the reference
grayscale used when calculating differences between the model and the inspected object image.
Normally, the factory default value will be used.
Reference: XDifference Image Display (Fine Matching) (p.383)
Measurement
This item specifies the judgement condition for measurement results. Specify the criteria to judge the
measurement result if the X and Y coordinates and the correlation values with the model are OK.
Measurement parameters can be changed as needed to address unstable measurement results or to
increase the processing speed.
Reference: XMeasurement Parameters (Fine Matching) (p.385)
Output
parameter
This item can be changed if necessary. Normally, the factory default value will be used.
Use the output parameter to specify how to handle the coordinates.
Reference: XOutput Parameters (Fine Matching) (p.387)
Necessary Steps Optional Steps
Verify/Adjust results
â–²
Model Registration (Fine Matching)
â–²
Measurement Parameters (Fine Matching)
Start
Settings completed
Test measurement
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Output Parameters (Fine Matching)
â–²
Diff. Image Disp. (Fine Matching)
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