Stage Data
738
FH/FZ5 Processing Item Function Reference Manual
External Reference Tables (Stage Data)
No. Data name Set/Get Data range
0 Judge Get only
0: No judgement (unmeasured)
1: Judgement result OK
-1: Judgement result NG
120 Stage type Set/Get
0: XY stage
1: XYθ st
age
2: θXY stage
3: UVW st
age
4: UVWR stage
5: Xθ (Yθ) st
age
6: θX (θY) stage
7: X (Y)
stage
121 Rotation polarity Set/Get
-1: Negative
1: Positive
122 Distance from rotation ce
nter to linear axis Set/Get 0.000000 to 99,999.999999
123 Axis parameter setting Set/Get
0:Setting by XY coordinate
1:Setting by Polar coordinate system.
124 Rotation center X Set/Get -99,999.999999 to 99,999.999999
125 Rotation center Y Set/Get -99,999.999999 to 99,999.999999
126 Fulcrum type Set/Get
0: Rotation
1: Linear
127 θ-axis type Set/Get
0: Direct drive
1: Linear drive
128 Camera movement axis X-axis Set/Get
0: Camera moving axis X is not used
1: Camera moving axis X is used
129 Camera movement axis Y-axis Set/Get
0: Camera moving axis Y is not used
1: Camera moving axis Y is used
130 R1 Set/Get 0.000000 to 99,999.999999
131 θ1 Set/Get -360.000000 to 360.000000
132 R2 Set/Get 0.000000 to 99,999.999999
133 θ2 Set/Get -360.000000 to 360.000000
134 R3 Set/Get 0.000000 to 99,999.999999
135 θ3 Set/Get -360.000000 to 360.000000
136 R4 Set/Get 0.000000 to 99,999.999999
137 θ4 Set/Get -360.000000 to 360.000000
150 UX Set/Get -99,999.999999 to 99,999.999999
151 UY Set/Get -99,999.999999 to 99,999.999999
152 VX Set/Get -99,999.999999 to 99,999.999999
153 VY Set/Get -99,999.999999 to 99,999.999999
154 WX Set/Get -99,999.999999 to 99,999.999999
155 WY Set/Get -99,999.999999 to 99,999.999999
156 RX Set/Get -99,999.999999 to 99,999.999999
157 RY Set/Get -99,999.999999 to 99,999.999999
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