Defect
364
FH/FZ5 Processing Item Function Reference Manual
Key Points for Adjustment
Select the adjustment method referring to the following points.
When the measurement results are unstable
Noise is detected as defects.
Judgement will be NG.
When the processing speed is slow
Measurement Results for Which Output Is Possible (Defect)
The following values can be output using processing items related to results output. It is also possible to
reference measurement values from expressions and other processing units.
Parameter to be adjusted Remedy
Measurement Specify a larger value for "Defect judgeme
nt" in the judgement conditions.
Parameter to be adjusted Remedy
Measurement
Make the measurement region larger than the low
e
r limit of the defect size. Or make the lower
limit of the defect detection size smaller than the measurement region.
Parameter to be adjusted Remedy
Measurement
Specify a larger value for the "Defect size".
Reduce the difference between the upper and
lower limits of [Defect size].
Measurement items Character string Description
Judgement JG Judgement result
Defect F Measured defect level
Position of defect X X Coordinate of measured defect position
Position of defect Y Y coordinate of measured defect position
Defect area AR The measured maximum defect area
Defect gravity GX
The center of gravity X coordinates o
f the measured maximum defect
area
Defect gravity GY
The center of gravity Y coordinates
of the measured maximum defect
area