Defect
356
FH/FZ5 Processing Item Function Reference Manual
Settings Flow (Defect)
Make the defect/contamination settings with the following flow.
List of Defect Items
Item name Description
Region setting
This item is used to set up the measurement area.
Instead of measuring the entire input image, narrowing the measurement area shortens the processing
time.
Reference: Region Setting (Defect) (p.357)
Mask setting
Set it when masking a region.
The measurement result of another processi
ng item
can also be used for masking.
Reference: Mask Setting (Defect) (p.358)
Measurement
This item specifies the judgement condition for measuremen
t resul
ts. Measurement parameters can be
changed as needed to address unstable measurement results or to increase the processing speed.
Normally, the factory default value will be used.
Reference: Measurement Parameters (Defect) (p.361)
Output
p
a
rameter
This item can be changed if necessary. Normally, the factory default value will be used.
Use the output parameter to specify how to handle the coordinates.
Reference: Output Parameters (Defect) (p.363
)
Necessary Steps Optional Steps
Verify/Adjust results
▲
Region Setting (Defect)
▲
Measurement Parameters (Defect)
Start
Settings completed
Test measurement
▲
Output Parameters (Defect)
▲
Mask Setting (Defect)