Omron fh-3 series - Judgement Condition (Calc Axis Move)

Calc Axis MoveFH/FZ5 Processing Item Function Reference Manual
791
4
Support Inspection and Measurement
Judgement Condition (Calc Axis Move)
This item specifies the judgement condition for measurement results.
1 When the setting has been changed,
click [Measure] to verify whether
measurements can be made correctly.
2 In the "Judgement condition" area, set
each item.
The following parameters are displayed in this menu based on the stage type.
: Show, : Hide
Displayed content
Not
selected
XY XYθ θXY UVW UVWR X(Y) Xθ(Yθ) θX(θY) 3 axes 4 axes
X axis movement
amount
Judg
ement upper/lower
li
mi
t values
          
Y axis movement
amount
Judgement upper/lower
li
mi
t values
          
θ axis an
gle movement
amoun
t
Judgement upper/lower
li
mi
t values
 

(θ axis
direct
dri
v
e)

(θ axis
direct
drive)
  

(θ ax
is
direct
drive)

(θ axis
direct
dri
ve)
 
θ axis li
near movement
amoun
t
Judgement upper/lower
li
mi
t values
 

(θ axis
line
a
r
drive)

(θ axis
lin
ear
drive)
  

(θ ax
is
linear
drive)

(θ axis
line
ar
drive)
 
U axis movement
amount
Judg
ement upper/lower
li
mi
t values
          
V axis movement
amoun
t
Judg
ement upper/lower
li
mi
t values
          
W axis movement
amount
Judgement upper/lower
li
mi
t values
          
R axis movement
amoun
t
Judg
ement upper/lower
li
mi
t values
          
If the reference data is the XYθ stage