Application example)
Chip condenser implementation on substrate
Substrate (reference workpiece)
Measurement position/angle
(MX,MY,MT)
Measurement position offset amount (OMX, OMY, OMT)
= (SX - MX, SY - MY, ST - MT)
Reference position offset amount (OSX, OSY, OST)
= (MX - SX, MY- SY, MT - ST)
Reference position/angle
(SX,SY,ST)
Implementation
Chip condenser (measurement workpiece)