Precise DefectFH/FZ5 Processing Item Function Reference Manual
373
2
Inspecting and Measuring
Setting item
Set value
[Factory default]
Description
Size X
4 to 64
[16]
Specify the X-axis size of defects/contamina
tion to be detected. The higher
this value, the higher the degree of defects for large defects. Specify in units
of pixels.
Size Y
4 to 64
[16]
Specify the Y-axis size of defects/cont
a
mination to be detected. The higher
this value, the higher the degree of defects for large defects. Specify in units
of pixels.
Sampling interval X
1 to 64
[2]
Specify the interval for creating element
s along the X axis. The smaller this
value, the greater the defect detection performance, but the slower the
processing speed. Specify in units of pixels.
Sampling interval Y
1 to 64
[2]
Specify the interval for creating element
s
along the Y axis. The smaller this
value, the greater the defect detection performance, but the slower the
processing speed. Specify in units of pixels.
Comparing interval X
1 to 32
[10]
Set the number of neighboring elements
co
mpared with when the degree of
defect is calculated, For example, if the sampling interval X is set to 4 and the
comparing interval X is set to 2, comparison is with separate elements of 4 ×
2 = 8 pixels along the X axis.
Comparing interval Y
1 to 32
[10]
This sets the number of neighboring elements compared with when the
d
egre
e of defect is calculated, For example, if the sampling interval Y is set to
4 and the comparing interval Y is set to 2, comparison is with separate
elements of 4 × 2 = 8 pixels along the Y axis.
Direction
•X
(circumferential)
• Y (radial)
• Diagonal
Set the direction for de
tecting defects.
The smaller the direction setting count, the shorter the processing time.
• Measurement mode
In Precise Defect measurement, the mea
surement mode depends on the number of registered region figures and
their types. The way to make elements depends on the measurement mode. The relationship between the figure
and measurement mode is as in the table below.
Line mode:
• The direction parallel to the measurement region straight li
ne i
s the X axis and the direction perpendicular is the
Y axis. The shape of elements is rectangular. The element width and length are the number of pixels specified
with the element size X and Y.
Wide circle and arc mode:
• The circumferential direction along the measurement regi
on wid
e circle (arc) is the X axis and the radial
direction is the Y axis. The shape of elements is fan-shaped. If the circumference length of the wide circle (arc)
of the measurement region is set to N, the element circumferential direction width is 360 degrees × the element
size X / N. The element radial direction width is the number of pixels specified with the element size Y. The
element circumferential direction width is defined as an angle, so the closer the element to the outer
circumference, the larger the element.
Region mode:
• The direction parallel to the measurement region is the X a
x
is and the direction perpendicular is the Y axis. The
shape of elements is rectangular. The element width and length are the number of pixels specified with the
element size X and Y.
Single figure
Multiple
figures
Line
Circumference
Arc Ellipse Rectangle Polygon
Measurement
mode
Line
Wide circle
and arc
Wide circle
and arc
Region Region Region Region
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