Omron fh-3 series - Page 722

Stage Data
720
FH/FZ5 Processing Item Function Reference Manual
Setting item
Setting value
[Factory default]
Description
Stage type
• [XY stage]
•XYθ stage
• θXY stage
•
UVW stage
• UVWR stage
• X(Y) stage
•Xθ(Yθ) st
age
• θX(θY) stage
Usabl
e "Stage types" are displayed. Select a stage.
Usable "Stage types" are as follows:
When XY stage, UVW stage, UVRW stage or X(Y) stage is
selected, the rotation polarity selection becomes disabled.
XY stage
XYθ stage
θXY stage
UVW stage
UVWR stage
X(Y) stage
θX(θY) stage
Xθ(Yθ) stage
When you select [X-axis]
as measurement axis,
[Xθ-stage] is set.
When you select [Y-axis]
as measurement axis,
[Yθ-stage] is set.
When you select [X-axis]
as measurement axis,
[θX-stage] is set.
When you select [Y-axis]
as measurement axis,
[θY-stage] is set.
When you select [X-axis]
as measurement axis,
[X-stage] is set.
When you select [Y-axis]
as measurement axis,
[Y-stage] is set.