Stage DataFH/FZ5 Processing Item Function Reference Manual
721
4
Support Inspection and Measurement
Setting the Data for Each Stage (XY Stage)
You can set 2-axis stage, i.e. XY stage in this function.
1 If XY stage is selected, the XY stage
setting area is displayed.
2 Click [...] in [X-axis limit] in the XY stage setting area to set the upper and lower limit values.
3 Likewise click [...] in [Y-axis limit] to set the upper and lower limit values.
Rotation poiarity
• [Positive]
• Negative
Select the rotation direction defined in the equipment is positive or
neg
ative co
mpared to the rotation direction in the stage coordinate
system.
Polarities are as follows:
Positive polarity/negative polarity
Setting item
Setting value
[Factory default]
Description
X-axis limit
99999.9999 to 99999.9999
[-99999.9999] to [99999.9999]
Set the upper and lower limit values for the X axis
movement
range of the XY stage. Units of the
coordinate system set in calibration is used.
Y-axis limit
-99999.9999 to 99999.9999
[-99999.9999] to [99999.9999]
Set the upper and lower limit values for the Y axis
movemen
t
range of the XY stage. Units of the
coordinate system set in calibration is used.
Setting item
Setting value
[Factory default]
Description
Y
X
A
B
Stage coordinate system
When positive rotation
direction of the device is
A: positive polarity
B: negative polarity
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