Omron fh-3 series - Page 783

Transfer Position DataFH/FZ5 Processing Item Function Reference Manual
781
4
Support Inspection and Measurement
If the stage type of the reference data is
the UVWR stage
Selects X-axis as movement axis when
X(Y)
Stage is set in reference data.
Selects Y-axis as movement axis when
X(
Y)
Stage is set in reference data.
Selects X-axis as movement axis when
Xθ(Yθ) or
θX(θY) Stage are set in
reference data.
Selects Y-axis as movement axis when
Xθ(Yθ) or
θX(θY) Stage are set in
reference data.
5 Click [Measure] to check the measurement results.
6 Set the judgement condition.
Setting item
Setting value
[Factory default]
Description
U-axis - Set how far the U axis position moved from the origin.
V-axis - Set how far the V axis position moved from the origin.
W-axis - Set how far the W axis position moved from the origin.
R-axis - Set how far the R axis position mo
ved from the origin.
Setting item
Setting value
[Factory default]
Description
X-axis - Set the measurement distance of X-axis from homing operation.
Setting item
Setting value
[Factory default]
Description
Y-axis - Set the measurement distance of Y-axis from homing operation.
Setting item
Setting value
[Factory default]
Description
X-axis - Set the measurement distance of X-axis
from homing operation.
θ-axis - Set the measurement distance of θ-axi
s from homing operation.
Setting item
Setting value
[Factory default]
Description
Y-axis - Set the measurement distance of Y-
axis from homing operation.
θ-axis - Set the measurement distance of θ-axi
s from homing operation.