Stage DataFH/FZ5 Processing Item Function Reference Manual
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4
Support Inspection and Measurement
θ axis type
• [Direct drive]
• Linear drive
Select the θ axis
drive type.
Direct drive: A drive system which matches the θ
axis rot
ation with the motor's axis of rotation.
Linear drive: A system which controls the θ axi
s
rotation by linear movement.
Distance from
rota
tion center to
linear axis
0.0000 to 99999.9999
[0.0000]
For the linear drive system, set the dis
t
ance (L)
from the stage rotation center to the linear axis.
Camera movement
axis
X-axis
• Checked
• [Unchecked]
Enable this setting if the camera moves instead of
th
e st
age axis.
If this is disabled, calculation for movement
amoun
t
and so on is performed on the premises
that the stage moves.
Y-axis
• Checked
• [Unchecked]
Setting item
Setting value
[Factory default]
Description
Rotation stage
Motor
Rotation stage
Motor
Rotation stage
Stage rotation center
Motor
L
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