Stage Data
726
FH/FZ5 Processing Item Function Reference Manual
Setting item
Setting value
[Factory default]
Description
Fulcrum type
•Linear
•[Rotation]
Select the slider operation type when the stage is rotated.
Linear
Rotation
U-axis direction
• [X-axis positive]
• X-axis negative
• Y-axis positive
• Y-axis negative
For the axis direction of the U axis, set the rotation center to the point of
orig
in then set it to either forward or backward with respect to the X axis or
Y axis direction in the XY coordinate system that is parallel or perpendicular
to each UVWR axis.
U-axis limit
-99999.9999 to
99999.9999
[-99999.9999] to
[9999
9.9999
]
Set the upper and lower limit values for the U axis mo
ve
ment range. Units
of the coordinate system set in calibration is used.
Image diagram
Movement of axis when a stage is rotated
The stage slider tilts.
: Slider : Pivot point
The pivot
point position
does not
move from
the top of the
ball screw
axis.
Image diagram
Movement of axis when a stage is rotated
The position of the pivot point
on the axis moves.
The stage
slider does
not tilt.
: Slider : Pivot point
X axis
U axis
Y axis
Rotation center
In this case, the X axis is in
the positive direction.
XY coordinate system that
becomes parallel or vertical
to UVWR axes
To Next Page
Loading...
